Modeling and Control of a Flexible Sensor Structure in Microassembly
| Authors: | Shen Yantao, Michigan State University, United States
Xi Ning, Michigan State University, United States
Li Wen J., The Chinese University of Hong Kong, China |
|---|
| Topic: | 4.3 Robotics |
|---|
| Session: | Flexible Robots |
|---|
| Keywords: | Force/position control, Force sensor, Flexible beam, Micro assembly |
|---|
Abstract
This paper aims at developing a force-guided microassembly technology with in-situ flexible polyvinylidenefluoride (PVDF) beam force sensing and hybrid force/position control based on an infinite dimensional model of the flexible sensor structure. Besides the designed 1-D PVDF cantilever based micro-force sensor, as the soft sensor structure itself is installed at the free end of micromanipulator, during manipulation, the sensor beam is necessary to be considered as a distributed parameter flexible link of the manipulator either. Then a hybrid micro-force/position control scheme on the basis of this infinite dimensional sensor/link model is developed. Experimental results verified the effectiveness of the hybrid control scheme as well as the performance of the developed micro-force sensor. Ultimately the technology will provide a critical and major step towards the development of automated manufacturing processes for batch assembly of micro devices.
