Multi--Parametric H-infinity Control of a Micro-Actuator
| Authors: | Nikolakopoulos George, University of Patras, Greece
Tzes Anthony, University of Patras, Greece
Dritsas Leonidas, University of Patras, Greece
Koveos Yiannis, University of Patras, Greece |
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| Topic: | 2.1 Control Design |
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| Session: | Advances in Hinf Control Theory and Applications |
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| Keywords: | MEMs, Micro--Actuator, $H_{\infty}$ controller |
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Abstract
In this article the control problem of a micro-actuator mu-A isconsidered. The mu-A is composed of a micro-capacitor, whoseone plate is clamped while its other flexible plate's motion isconstrained by hinges acting as a combination of springs anddashpots. The distance of the plates is varied by the appliedvoltage between them. The flexibility of the moving plate coupledto the dynamics of the plate's rigid-body motion results in anunstable, nonlinear system of distributed nature. Utilization ofFEM can approximate the mu-A dynamics nonlinear-PDE to a finitenonlinear-ODE. The nonlinearity stems from the plate's rigid-bodymotion, while all flexibility effects are considered as additivelinear-terms. A controller composed of: a) a feedforward term forregulation at selected setpoints, and b) a multi-parametricH-infinity-feedback controller to handle any deviations.
