More Process System Engineering (PSE) Applications in Integrated Circuit (IC) Manufacturing
Abstract
The manufacture of integrated circuits is driven by a demand for faster calculation capabilities and lower costs, which will require the development of a new generation of manufacturing tools to increase yield productivity, spearheaded by improved measurement devices and advanced process control. The objectives of this paper are review of the challenges in two main PSE areas: process monitoring and process control. PSE solutions appropriate for these challenges involve harnessing multivariate statistics, automated modeling approaches like genetic programming, and multivariable model-based control. The paper is illustrated with several example applications, all tested in fabrication facilities in Israel.
