MEMS-fabricated Accelerometers with Feedback Compensation
| Authors: | Cho Dong-il, Seoul National University, Korea, Republic of
Park Yonghwa, Seoul National University, Korea, Republic of
Park Sangjun, Seoul National University, Korea, Republic of
Choi Byung-doo, Seoul National University, Korea, Republic of
Ko Hyoungho, Seoul National University, Korea, Republic of
Song Taeyong, Seoul National University, Korea, Republic of
Lim Geunwon, Seoul National University, Korea, Republic of |
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| Topic: | 4.1 Components and Instruments |
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| Session: | Micro-Electro-Mechanical Systems |
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| Keywords: | Acelerometers, Feedback control, Modelling, Simulation |
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Abstract
This paper presents a feedback-controlled, MEMS-fabricated microaccelerometer (µXL). The µXL has received much commercial attraction, but its performance is generally limited. To improve the open-loop performance, a feedback controller is designed and experimentally evaluated. The feedback controller is applied to the x/y-axis µXL fabricated by sacrificial bulk micromachining (SBM) process. Even though the resolution of the closed-loop system is slightly worse than open-loop system, the bandwidth, linearity, and bias stability are significantly improved. The noise equivalent resolution of open-loop system is 0.615 mg and that of closed-loop system is 0.864 mg. The bandwidths of open-loop and closed-loop system are over 100 Hz. The input range, non-linearity and bias stability are improved from ±10 g to ±18 g, from 11.1 %FSO to 0.86 %FSO, and from 0.221 mg to 0.128 mg, respectively.
