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Design considerations for electromechanical actuation in precision motion systems

Authors:Schneiders Maurice, Eindhoven, University of Technology, Netherlands
Makarovic Juraj, Eindhoven, University of Technology, Netherlands
van de Molengraft Rene', Eindhoven, University of Technology, Netherlands
Steinbuch Maarten, Eindhoven, University of Technology, Netherlands
Topic:4.1 Components and Instruments
Session:Micro-Electro-Mechanical Systems
Keywords: setpoint design, motion control, mechatronic modeling, transconductance amplifier,voice-coil actuator

Abstract

In this paper the actuation system, often encountered high-precision motion systems, isstudied. To find out the limitations of the actuation system, a integrated electromechanical modelof the amplifier, actuator and mechanics is derived. This is done in a system'stheory-approach, so that amplifier feedback circuit design can be tuned usingloop-shaping techniques.Stability analysis is carried out for the amplifier feedback network design, includingrelevant uncertainties in the actuator under working conditions. The important limitingproperties of the amplifier are discussed, and translated into constraints for setpointdesign. Further, ideas for improvement of existing actuation systems are given.