Control Problem Classification for a Plasma Process
| Authors: | Iordanov Petar, NUI Maynooth, Ireland
Ringwood John, NUI Maynooth, Ireland
Doherty Sean, NUI Maynooth, Ireland |
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| Topic: | 1.1 Modelling, Identification & Signal Processing |
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| Session: | Applications of Nonlinear Modeling Methods |
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| Keywords: | physical models, process control, nonlinearity, linearization |
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Abstract
The use of first-principles based models of plasma processes isdiscussed in this paper. Such processes are essentially highlynonlinear, feature complex interactions and are difficult toanalyze. As an illustration of the nature of first-principle basedmodels, a characterisation of a simple plasma process is presentedin this work. Quantification of the nonlinearity, in terms of steady-state anddynamics behavior, is carried out for the studied process. The use of Hammerstein model and itsapplicability to the plasma process is also investigated. A basicstabilising controller for the simple plasma process is designedand its performance is analysed.
