Precise Positioning of Piezo-Actuated Stages Using Hysteresis-Observer Based Control

Authors:	Lin Chih-Jer, Da-Yeh University, Taiwan Yang Sheng-Ren, Da-Yeh University, Taiwan
Topic:	2.1 Control Design
Session:	Nonlinear Control Systems II
Keywords:	Modelling, Quadratic programming, Parameter estimation, Observers, Real-time

Abstract

The piezo-actuated stages are composed of the piezo-electric actuator and the positioning mechanism. The positioning accuracy of the piezo-actuated stage is limited due to hysteretic nonlinearity of the PEA and friction behaviour of the positioning mechanism. To compensate this nonlinearity of piezoelectric actuator, a PI feedback control associated with feedforward compensating based on the hysteresis observer is proposed in this paper. To verify the consistency of the proposed method, the experiments are implemented by real-time control to be compared with the numerical simulation.