An Electromechanical Sigma-delta Modulator for MEMS Gyroscope
| Authors: | Chang Byung Su, Seoul national university, Korea, Republic of
Lee Jang Gyu, Seoul national university, Korea, Republic of
Kang Taesam, Konkuk university, Korea, Republic of
Sung Woon-Tahk, Seoul national university, Korea, Republic of |
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| Topic: | 4.1 Components and Instruments |
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| Session: | Micro-Electro-Mechanical Systems |
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| Keywords: | Sigma-delta modulator, Gyroscope, MEMS, Inertial sensor, INS |
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Abstract
This paper presents a design and analysis of electromechanical sigma-delta modulator for MEMS gyroscope, which enables us to control the proof mass and to obtain an exact digital output without additional A/D conversion. The system structure and the circuit realization of the sigma-delta modulation are simpler than those of the analog sensing and feedback circuit. Based on the electrical sigma-delta modulator theory, a compensator is designed to improve the closed loop performance of the sensor. With the designed compensator, a closed loop performance of the gyroscope is enhanced to have wider bandwidth, larger dynamic range and direct digital output compared with those of an analog open loop system.
