Friction Modelling of a Linear High-Precision Actuator
| Authors: | Zimmermann Jan, Technische Universität Ilmenau, Germany
Sawodny Oliver, Technische Universität Ilmenau, Germany
Hausotte Tino, Technische Universität Ilmenau, Germany
Jaeger Gerd, Technische Universität Ilmenau, Germany |
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| Topic: | 4.1 Components and Instruments |
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| Session: | Micro-Electro-Mechanical Systems |
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| Keywords: | friction models, friction identification, high resolution measuring |
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Abstract
For control applications aiming accurate positioning and path tracking friction modelling and compensation can be very important, especially when working with small displacements as usual in nano technologies. The paper at hand describes friction identification and friction model application for a linear high-precision ball bearing guide driven by a voice coil actuator and using high-resolution position measurement equipment. After noting some friction models the characteristics of friction on nanometer scale are investigated with several experiments. At last some remarks on control design are given.
