This paper presents a 3D simulation environment for track systems in semiconductor fabrication. The track systems together with exposure tools carry out important functions of the photolithography process of semiconductor fabrication. The developed 3D track simulator can be used for design and evaluation of track systems, and their performance analysis. The main goal of the 3D track simulator is to provide a user with more accurate simulation environment for track systems. The developed 3D simulator consists of GUI (Graphic User Interface), scheduler, animator, and performance analyzer, where the animator part is constructed based on a discrete event simulation software, AutoMod, of Autosimulations.