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Control of Industrial Processes
Session Slot: T-Tu-M11
Area Code: 7a
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| Paper Title | Authors | | |
| Identification and Control of an Industrial Polymerisation Process | Geoffrey Mourue, Pierre Descamps, Denis Dochain and Vincent Wertz |  |  |
| Multi-Loop Controllers Using Wavelet Packet Decomposition for Film Processes | Yoshihiro Hashimoto, Koji Urase, Toshiaki Itoh, Takashi Hamaguchi, Yoshitaka Togari, Haruhiko Maki and Norikazu Yasutomo | | |
| Processing of Semiconductor Quartz Photomarks on Bake-Plates | Weng Khuen HO, Arthur TAY and Khiang Wee LIM | | |
| On Control of Resist Film Uniformity in the Microlithography Process | Ho Weng Khuen, Lee Lay Lay, Charles Schaper | | |
| A Hybrid Automaton Representation of Simulated Moving Bed Processes | Tobias Kleinert, Jan Lunze | | |
| Neural Network-based Identification and MPC control of SMB Chromatography | Chaoyong Wang, Sebastian Engell, Felix Hanisch | | |