We have studied the thermal chemistry of SiH4 on the clean and O-covered Pd(111) surface and on the O-covered Pt(111) surface. The reaction between adsorbed silane and oxygen on both Pd(111) and Pt(111) resulted in SiOX surface species that differs between the Pd and Pt surfaces. These differences are revealed primarily through high resolution electron energy loss spectroscopy (HREELS), but differences are also observed via auger electron spectroscopy (AES). High temperature annealing of SiOX covered Pd(111) surface resulted in long range order of the suboxide through the presence of phonon modes. These modes are absent in the structures formed on Pt(111), and in fact the highest coverage structures on Pt(111) lead to observations of a structurally different Si-O bonding structure than what is seen on Pd(111). AES results show low coverages of Si on the Pt(111) surface, and show Si atoms heavily influenced by the metal surface. DFT modeling of small discreet Si-O bonding structures in addition to one continuous Si-O bonding structure show more similarities in calculated vibration modes to experimental derived spectra on Pt(111) than Pd(111). Additionally, the modeled structures are much more stable on a Pt(111) slab than on the Pd(111) slab. DFT results showed the modeled continuous Si-O bonding structure to be markedly more stable than other modeled structures. The suboxide covered surfaces can be used as model interfaces which can serve as platforms to study the interfacial chemistry of the simple but important probe molecules, H2 and CO. In this presentation, our progress in using a combination of experimental and theoretical tools to analyze this model interfacial chemistry, and its dependence on temperature, metal composition, and other conditions will be discussed.