Electronics and Photonics |
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| Session 56 - Topics in Plasma Science and Thin Film Applications I - in Honor of Herbert H. Sawin | |||
| Topics in Plasma Science and Thin Film Applications I - In Honor of Herbert H. Sawin | |||
| Chair: | Jane P. Chang | ||
| CoChair: | Sumit Agarwal | ||
| 56a | Past and Future of Modeling and Simulation for Plasma Processing Demetre J. Economou |
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| 56b | Atomistic Simulations of Feature Scale Etch Profile Evolution David B. Graves, Joseph J. Vegh |
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| 56c | Overcoming Patterning Challenges at the 32 Nm Nodes Arpan Mahorowala |
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| 56d | From the Sawin Lab to NASA: Uses of Very Long Vacuum Tubes Brett A. Cruden |
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| 56e | Highlights on Plasma-Surface Interactions – Honoring the Distinguished Career of Herbert H. Sawin Jane P. Chang |
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