Call for Papers
DESIGN AND CONTROL OF MICROELECTRONICS
MANUFACTURING PROCESSES
1998 AIChE Fall Annual Meeting
November 15-20, 1998
Miami Beach, FL
Session 19b09
Papers are sought which describe process systems engineering applications
to microelectronics manufacturing processes including model development,
reaction and transport simulations, model reduction, optimization, monitoring
and model-based control.
Abstracts (500-1000 words) may be submitted via the AIChE Web site at:
http://www.aiche.org/docs/meetapp/programming/cfp.htm
Instructions for submitting a proposal to present (PTP) containing the
abstract and author information can be found on the AIChE Web site.
The deadline for abstract submission is April 15, 1998.
For additional information, contact:
Session Chair: Session Co-Chair:
Panagiotis D. Christofides Dennis D. Sourlas
Department of Chemical Engineering Department of Chemical Engineering
University of California University of Missouri
Los Angeles, CA 90095 Rolla , MO 65409-1230
Telephone Number: (310)-794-1015 Telephone Number: (573)-341-6331
Fax Number: (310)-206-4107 Fax Number: (573)-341-4377
Email: pdc@seas.ucla.edu Email: dsourlas@umr.edu